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Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087532/ https://www.ncbi.nlm.nih.gov/pubmed/27775624 http://dx.doi.org/10.3390/s16101747 |