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Intrinsic stability of ferroelectric and piezoelectric properties of epitaxial PbZr(0.45)Ti(0.55)O(3) thin films on silicon in relation to grain tilt
Piezoelectric thin films of PbZr(0.45)Ti(0.55)O(3) were grown on Si substrates in four different ways, resulting in different crystalline structures, as determined by x-ray analysis. The crystalline structures were different in the spread in tilt angle and the in-plane alignment of the crystal plane...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Taylor & Francis
2013
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090325/ https://www.ncbi.nlm.nih.gov/pubmed/27877599 http://dx.doi.org/10.1088/1468-6996/14/4/045006 |