Laser-vibrometric ultrasonic characterization of resonant modes and quality factors of Ge membranes

The vibrations of a single-crystal germanium (Ge) membrane are studied in air and vacuum using laser vibrometry, in order to determine mechanical properties such as Q-factors, tensile stress, anisotropy, and robustness to shock. Resonance modes up to 3:2 are identified, giving a residual stress meas...

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Detalles Bibliográficos
Autores principales: Trushkevych, Oksana, A Shah, Vishal, Myronov, Maksym, E Halpin, John, D Rhead, Stephen, J Prest, Martin, R Leadley, David, S Edwards, Rachel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2014
Materias:
Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090416/
https://www.ncbi.nlm.nih.gov/pubmed/27877665
http://dx.doi.org/10.1088/1468-6996/15/2/025004

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090416/
https://www.ncbi.nlm.nih.gov/pubmed/27877665
http://dx.doi.org/10.1088/1468-6996/15/2/025004

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