Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge

The pre-treatment of substrate surfaces prior to deposition is important for the adhesion of physical vapour deposition coatings. This work investigates Si surfaces after the bombardment by energetic Cr ions which are created in cathodic arc discharges. The effect of the pre-treatment is analysed by...

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Detalles Bibliográficos
Autores principales: Scopece, Daniele, Döbeli, Max, Passerone, Daniele, Maeder, Xavier, Neels, Antonia, Widrig, Beno, Dommann, Alex, Müller, Ulrich, Ramm, Jürgen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2016
Materias:
Optical, Magnetic and Electronic Device Materials
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5101858/
https://www.ncbi.nlm.nih.gov/pubmed/27877854
http://dx.doi.org/10.1080/14686996.2016.1140308

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5101858/
https://www.ncbi.nlm.nih.gov/pubmed/27877854
http://dx.doi.org/10.1080/14686996.2016.1140308

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