Simulation of SAW Humidity Sensors Based on [Formula: see text] ZnO/R-Sapphire Structures

The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of [Formula: see text] ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based o...

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Detalles Bibliográficos
Autores principales: Lan, Xiao-Dong, Zhang, Shu-Yi, Fan, Li, Wang, Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134427/
https://www.ncbi.nlm.nih.gov/pubmed/27827856
http://dx.doi.org/10.3390/s16111112

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5134427/
https://www.ncbi.nlm.nih.gov/pubmed/27827856
http://dx.doi.org/10.3390/s16111112

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