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~3-nm ZnO Nanoislands Deposition and Application in Charge Trapping Memory Grown by Single ALD Step
Low-dimensional semiconductor nanostructures are of great interest in high performance electronic and photonic devices. ZnO is considered to be a multifunctional material due to its unique properties with potential in various applications. In this work, 3-nm ZnO nanoislands are deposited by Atomic L...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5171791/ https://www.ncbi.nlm.nih.gov/pubmed/27991492 http://dx.doi.org/10.1038/srep38712 |