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Analytical Chemistry and Material Purity in the Semiconductor Industry
| Autor principal: | |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1988
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5181934/ http://dx.doi.org/10.6028/jres.093.091 |
| _version_ | 1782485797318950912 |
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| author | Seegopaul, Purneshwar |
| author_facet | Seegopaul, Purneshwar |
| author_sort | Seegopaul, Purneshwar |
| collection | PubMed |
| description | |
| format | Online Article Text |
| id | pubmed-5181934 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 1988 |
| publisher | [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-51819342021-08-02 Analytical Chemistry and Material Purity in the Semiconductor Industry Seegopaul, Purneshwar J Res Natl Bur Stand (1977) Article [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1988 1988-06-01 /pmc/articles/PMC5181934/ http://dx.doi.org/10.6028/jres.093.091 Text en https://creativecommons.org/publicdomain/zero/1.0/ The Journal of Research of the National Bureau of Standards is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright. |
| spellingShingle | Article Seegopaul, Purneshwar Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title | Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title_full | Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title_fullStr | Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title_full_unstemmed | Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title_short | Analytical Chemistry and Material Purity in the Semiconductor Industry |
| title_sort | analytical chemistry and material purity in the semiconductor industry |
| topic | Article |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5181934/ http://dx.doi.org/10.6028/jres.093.091 |
| work_keys_str_mv | AT seegopaulpurneshwar analyticalchemistryandmaterialpurityinthesemiconductorindustry |