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Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials

Detalles Bibliográficos
Autores principales: Saisho, Hideo, Tanaka, Masataka, Nakamura, Koichi, Mori, Eiji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1988
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5181935/
http://dx.doi.org/10.6028/jres.093.092
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author Saisho, Hideo
Tanaka, Masataka
Nakamura, Koichi
Mori, Eiji
author_facet Saisho, Hideo
Tanaka, Masataka
Nakamura, Koichi
Mori, Eiji
author_sort Saisho, Hideo
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spelling pubmed-51819352021-08-02 Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials Saisho, Hideo Tanaka, Masataka Nakamura, Koichi Mori, Eiji J Res Natl Bur Stand (1977) Article [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1988 1988-06-01 /pmc/articles/PMC5181935/ http://dx.doi.org/10.6028/jres.093.092 Text en https://creativecommons.org/publicdomain/zero/1.0/ The Journal of Research of the National Bureau of Standards is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.
spellingShingle Article
Saisho, Hideo
Tanaka, Masataka
Nakamura, Koichi
Mori, Eiji
Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title_full Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title_fullStr Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title_full_unstemmed Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title_short Determination of Traces of Uranium and Thorium in Microelectronics Constituent Materials
title_sort determination of traces of uranium and thorium in microelectronics constituent materials
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5181935/
http://dx.doi.org/10.6028/jres.093.092
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AT tanakamasataka determinationoftracesofuraniumandthoriuminmicroelectronicsconstituentmaterials
AT nakamurakoichi determinationoftracesofuraniumandthoriuminmicroelectronicsconstituentmaterials
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