Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes

Electrostatic driving and capacitive detection is widely used in micro hemispheric shell resonators (HSR). The capacitor gap distance is a dominant factor for the initial capacitance, and affects the driving voltage and sensitivity. In order to decrease the equivalent gap distance, a micro HSR with...

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Detalles Bibliográficos
Autores principales: Wang, Renxin, Bai, Bing, Feng, Hengzhen, Ren, Ziming, Cao, Huiliang, Xue, Chenyang, Zhang, Binzhen, Liu, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5190972/
https://www.ncbi.nlm.nih.gov/pubmed/27897977
http://dx.doi.org/10.3390/s16121991

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5190972/
https://www.ncbi.nlm.nih.gov/pubmed/27897977
http://dx.doi.org/10.3390/s16121991

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