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Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy
The analysis of polymers by secondary ion mass spectrometry (SIMS) has been a topic of interest for many years. In recent years, the primary ion species evolved from heavy monatomic ions to cluster and massive cluster primary ions in order to preserve a maximum of organic information. The progress i...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5238654/ https://www.ncbi.nlm.nih.gov/pubmed/28144525 http://dx.doi.org/10.3762/bjnano.7.168 |