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Formation of Self-Connected Si(0.8)Ge(0.2) Lateral Nanowires and Pyramids on Rib-Patterned Si(1 1 10) Substrate

In this work, Si(0.8)Ge(0.2) is deposited onto the rib-patterned Si (1 1 10) template oriented in the [1 −1 0] direction. Atomic force microscopy (AFM) reveals that the rib sidewalls reshape into pyramid-covered (0 0 1) and smooth {1 1 3} facets, respectively, while the {1 0 5} facets-bounded latera...

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Detalles Bibliográficos
Autores principales: Du, Lei, Chen, Gang, Lu, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5265224/
https://www.ncbi.nlm.nih.gov/pubmed/28120245
http://dx.doi.org/10.1186/s11671-016-1820-z

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