Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Micro- and nanostructures with three-dimensional (3D) shapes are needed for a variety of applications in optics and fluidics where structures with both smooth and sharp features enhance the performance and functionality. We present a novel method for the generation of true 3D surfaces based on therm...

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Detalles Bibliográficos
Autores principales: Schleunitz, Arne, Guzenko, Vitaliy A, Messerschmidt, Martin, Atasoy, Hakan, Kirchner, Robert, Schift, Helmut
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Korea Nano Technology Research Society 2014
Materias:
Research
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5270991/
https://www.ncbi.nlm.nih.gov/pubmed/28191390
http://dx.doi.org/10.1186/s40580-014-0007-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5270991/
https://www.ncbi.nlm.nih.gov/pubmed/28191390
http://dx.doi.org/10.1186/s40580-014-0007-5

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