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Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
Micro- and nanostructures with three-dimensional (3D) shapes are needed for a variety of applications in optics and fluidics where structures with both smooth and sharp features enhance the performance and functionality. We present a novel method for the generation of true 3D surfaces based on therm...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Korea Nano Technology Research Society
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5270991/ https://www.ncbi.nlm.nih.gov/pubmed/28191390 http://dx.doi.org/10.1186/s40580-014-0007-5 |