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Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters

We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstra...

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Autores principales: Hajjaj, Amal Z., Hafiz, Md Abdullah, Younis, Mohammad I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5278359/
https://www.ncbi.nlm.nih.gov/pubmed/28134329
http://dx.doi.org/10.1038/srep41820
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author Hajjaj, Amal Z.
Hafiz, Md Abdullah
Younis, Mohammad I.
author_facet Hajjaj, Amal Z.
Hafiz, Md Abdullah
Younis, Mohammad I.
author_sort Hajjaj, Amal Z.
collection PubMed
description We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.
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spelling pubmed-52783592017-02-03 Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters Hajjaj, Amal Z. Hafiz, Md Abdullah Younis, Mohammad I. Sci Rep Article We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage. Nature Publishing Group 2017-01-30 /pmc/articles/PMC5278359/ /pubmed/28134329 http://dx.doi.org/10.1038/srep41820 Text en Copyright © 2017, The Author(s) http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Article
Hajjaj, Amal Z.
Hafiz, Md Abdullah
Younis, Mohammad I.
Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title_full Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title_fullStr Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title_full_unstemmed Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title_short Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
title_sort mode coupling and nonlinear resonances of mems arch resonators for bandpass filters
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5278359/
https://www.ncbi.nlm.nih.gov/pubmed/28134329
http://dx.doi.org/10.1038/srep41820
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