Formation of nanostructured metallic glass thin films upon sputtering

Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the mo...

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Autores principales: Ketov, Sergey V., Joksimovic, Rastko, Xie, Guoqiang, Trifonov, Artem, Kurihara, Kazue, Louzguine-Luzgin, Dmitri V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5291747/
https://www.ncbi.nlm.nih.gov/pubmed/28194451
http://dx.doi.org/10.1016/j.heliyon.2016.e00228
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author Ketov, Sergey V.
Joksimovic, Rastko
Xie, Guoqiang
Trifonov, Artem
Kurihara, Kazue
Louzguine-Luzgin, Dmitri V.
author_facet Ketov, Sergey V.
Joksimovic, Rastko
Xie, Guoqiang
Trifonov, Artem
Kurihara, Kazue
Louzguine-Luzgin, Dmitri V.
author_sort Ketov, Sergey V.
collection PubMed
description Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.
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spelling pubmed-52917472017-02-13 Formation of nanostructured metallic glass thin films upon sputtering Ketov, Sergey V. Joksimovic, Rastko Xie, Guoqiang Trifonov, Artem Kurihara, Kazue Louzguine-Luzgin, Dmitri V. Heliyon Article Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined. Elsevier 2017-01-09 /pmc/articles/PMC5291747/ /pubmed/28194451 http://dx.doi.org/10.1016/j.heliyon.2016.e00228 Text en © 2017 The Authors http://creativecommons.org/licenses/by/4.0/ This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Ketov, Sergey V.
Joksimovic, Rastko
Xie, Guoqiang
Trifonov, Artem
Kurihara, Kazue
Louzguine-Luzgin, Dmitri V.
Formation of nanostructured metallic glass thin films upon sputtering
title Formation of nanostructured metallic glass thin films upon sputtering
title_full Formation of nanostructured metallic glass thin films upon sputtering
title_fullStr Formation of nanostructured metallic glass thin films upon sputtering
title_full_unstemmed Formation of nanostructured metallic glass thin films upon sputtering
title_short Formation of nanostructured metallic glass thin films upon sputtering
title_sort formation of nanostructured metallic glass thin films upon sputtering
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5291747/
https://www.ncbi.nlm.nih.gov/pubmed/28194451
http://dx.doi.org/10.1016/j.heliyon.2016.e00228
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