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Formation of nanostructured metallic glass thin films upon sputtering

Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the mo...

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Detalles Bibliográficos
Autores principales:	Ketov, Sergey V., Joksimovic, Rastko, Xie, Guoqiang, Trifonov, Artem, Kurihara, Kazue, Louzguine-Luzgin, Dmitri V.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Elsevier 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5291747/ https://www.ncbi.nlm.nih.gov/pubmed/28194451 http://dx.doi.org/10.1016/j.heliyon.2016.e00228

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