An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate. The needle-to-cylinder electrode is designed and fabricated by Lithographie, Galvanoformung and Abformung (LIGA) technology. In this paper, the needle is connected to a negative power supply of −5 kV and used as the cathode; the cylinder electrodes are composed of two arrays of cylinders and serve as the anode. The ionic wind is produced based on corona and glow discharges of needle-to-cylinder electrodes. The experimental setup is designed to observe the properties of the needle-to-cylinder discharge and prove its functions as an ion source and air pump. In summary, the main results are as follows: (1) the ionic wind velocity produced by the chip is about 0.79 m/s at an applied voltage of −3300 V; (2) acetic acid and ammonia water can be injected through the chip, which is proved by pH test paper; and (3) the current measured by a Faraday cup is about 10 pA for acetic acid and ammonia with an applied voltage of −3185 V. The integrated chip is promising for portable analytical instruments, such as ion mobility spectrometry (IMS), field asymmetric ion mobility spectrometry (FAIMS), and mass spectrometry (MS).