A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temp...

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Detalles Bibliográficos
Autores principales: Li, Bo, Zhao, Yulong, Li, Cun, Cheng, Rongjun, Sun, Dengqiang, Wang, Songli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298751/
https://www.ncbi.nlm.nih.gov/pubmed/28106798
http://dx.doi.org/10.3390/s17010178

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5298751/
https://www.ncbi.nlm.nih.gov/pubmed/28106798
http://dx.doi.org/10.3390/s17010178

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