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On-Demand Fabrication of Si/SiO(2) Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation

We demonstrate the fabrication of the large-area arrays of vertically aligned Si/SiO(2) nanowires with full tunability of the geometry of the single nanowires by the metal-assisted chemical etching technique and the following thermal oxidation process. To fabricate the geometry controllable Si/SiO(2...

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Detalles Bibliográficos
Autores principales:	Cao, Huaxiang, Li, Xinhua, Zhou, Bukang, Chen, Tao, Shi, Tongfei, Zheng, Jianqiang, Liu, Guangqiang, Wang, Yuqi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2017
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5307406/ https://www.ncbi.nlm.nih.gov/pubmed/28209026 http://dx.doi.org/10.1186/s11671-017-1883-5

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