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High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition

Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the surface atomic terraces a...

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Detalles Bibliográficos
Autores principales:	Wang, Jiaming, Xu, Fujun, He, Chenguang, Zhang, Lisheng, Lu, Lin, Wang, Xinqiang, Qin, Zhixin, Shen, Bo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5318880/ https://www.ncbi.nlm.nih.gov/pubmed/28220829 http://dx.doi.org/10.1038/srep42747

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