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Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement
Self-sensing techniques for atomic force microscope (AFM) cantilevers have several advantageous characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts h...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5331182/ https://www.ncbi.nlm.nih.gov/pubmed/28326225 http://dx.doi.org/10.3762/bjnano.8.38 |
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author | Moore, Steven Ian Ruppert, Michael G Yong, Yuen Kuan |
author_facet | Moore, Steven Ian Ruppert, Michael G Yong, Yuen Kuan |
author_sort | Moore, Steven Ian |
collection | PubMed |
description | Self-sensing techniques for atomic force microscope (AFM) cantilevers have several advantageous characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts have led to an increased research interest in these methods. However, for multifrequency AFM, the optimization of the transducer layout on the cantilever for higher order modes has not been addressed. To fully utilize an integrated piezoelectric transducer, this work alters the layout of the piezoelectric layer to maximize both the deflection of the cantilever and measured piezoelectric charge response for a given mode with respect to the spatial distribution of the strain. On a prototype cantilever design, significant increases in actuator and sensor sensitivities were achieved for the first four modes without any substantial increase in sensor noise. The transduction mechanism is specifically targeted at multifrequency AFM and has the potential to provide higher resolution imaging on higher order modes. |
format | Online Article Text |
id | pubmed-5331182 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | Beilstein-Institut |
record_format | MEDLINE/PubMed |
spelling | pubmed-53311822017-03-21 Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement Moore, Steven Ian Ruppert, Michael G Yong, Yuen Kuan Beilstein J Nanotechnol Full Research Paper Self-sensing techniques for atomic force microscope (AFM) cantilevers have several advantageous characteristics compared to the optical beam deflection method. The possibility of down scaling, parallelization of cantilever arrays and the absence of optical interference associated imaging artifacts have led to an increased research interest in these methods. However, for multifrequency AFM, the optimization of the transducer layout on the cantilever for higher order modes has not been addressed. To fully utilize an integrated piezoelectric transducer, this work alters the layout of the piezoelectric layer to maximize both the deflection of the cantilever and measured piezoelectric charge response for a given mode with respect to the spatial distribution of the strain. On a prototype cantilever design, significant increases in actuator and sensor sensitivities were achieved for the first four modes without any substantial increase in sensor noise. The transduction mechanism is specifically targeted at multifrequency AFM and has the potential to provide higher resolution imaging on higher order modes. Beilstein-Institut 2017-02-06 /pmc/articles/PMC5331182/ /pubmed/28326225 http://dx.doi.org/10.3762/bjnano.8.38 Text en Copyright © 2017, Moore et al. https://creativecommons.org/licenses/by/4.0https://www.beilstein-journals.org/bjnano/termsThis is an Open Access article under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano/terms) |
spellingShingle | Full Research Paper Moore, Steven Ian Ruppert, Michael G Yong, Yuen Kuan Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title | Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title_full | Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title_fullStr | Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title_full_unstemmed | Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title_short | Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
title_sort | multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement |
topic | Full Research Paper |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5331182/ https://www.ncbi.nlm.nih.gov/pubmed/28326225 http://dx.doi.org/10.3762/bjnano.8.38 |
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