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Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains
[Image: see text] Pb(Zr(0.52)Ti(0.48))O(3) (PZT) films with (001) orientation were deposited on Pt(111)/Ti/SiO(2)/Si(100) substrates using pulsed laser deposition. Variation of the laser pulse rate during the deposition of the PZT films was found to play a key role in the control of the microstructu...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American
Chemical Society
2017
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5364435/ https://www.ncbi.nlm.nih.gov/pubmed/28247756 http://dx.doi.org/10.1021/acsami.6b16470 |
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author | Nguyen, Minh D. Houwman, Evert P. Dekkers, Matthijn Rijnders, Guus |
author_facet | Nguyen, Minh D. Houwman, Evert P. Dekkers, Matthijn Rijnders, Guus |
author_sort | Nguyen, Minh D. |
collection | PubMed |
description | [Image: see text] Pb(Zr(0.52)Ti(0.48))O(3) (PZT) films with (001) orientation were deposited on Pt(111)/Ti/SiO(2)/Si(100) substrates using pulsed laser deposition. Variation of the laser pulse rate during the deposition of the PZT films was found to play a key role in the control of the microstructure and to change strongly the piezoelectric response of the thin film. The film deposited at low pulse rate has a denser columnar microstructure, which improves the transverse piezoelectric coefficient (d(31f)) and ferroelectric remanent polarization (P(r)), whereas the less densely packed columnar grains in the film deposited at high pulse rates give rise to a significantly higher longitudinal piezoelectric coefficient (d(33f)) value. The effect of film thickness on the ferroelectric and piezoelectric properties of the PZT films was also investigated. With increasing film thickness, the grain column diameter gradually increases, and also the average P(r) and d(33f) values become larger. The largest piezoelectric coefficient of d(33f) = 408 pm V(–1) was found for a 4-μm film thickness. From a series of films in the thickness range 0.5–5 μm, the z-position dependence of the piezoelectric coefficient could be deduced. A local maximum value of 600 pm V(–1) was deduced in the 3.5–4.5 μm section of the thickest films. The dependence of the film properties on film thickness is attributed to the decreasing effect of the clamping constraint imposed by the substrate and the increasing spatial separation between the grains with increasing film thickness. |
format | Online Article Text |
id | pubmed-5364435 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | American
Chemical Society |
record_format | MEDLINE/PubMed |
spelling | pubmed-53644352017-03-27 Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains Nguyen, Minh D. Houwman, Evert P. Dekkers, Matthijn Rijnders, Guus ACS Appl Mater Interfaces [Image: see text] Pb(Zr(0.52)Ti(0.48))O(3) (PZT) films with (001) orientation were deposited on Pt(111)/Ti/SiO(2)/Si(100) substrates using pulsed laser deposition. Variation of the laser pulse rate during the deposition of the PZT films was found to play a key role in the control of the microstructure and to change strongly the piezoelectric response of the thin film. The film deposited at low pulse rate has a denser columnar microstructure, which improves the transverse piezoelectric coefficient (d(31f)) and ferroelectric remanent polarization (P(r)), whereas the less densely packed columnar grains in the film deposited at high pulse rates give rise to a significantly higher longitudinal piezoelectric coefficient (d(33f)) value. The effect of film thickness on the ferroelectric and piezoelectric properties of the PZT films was also investigated. With increasing film thickness, the grain column diameter gradually increases, and also the average P(r) and d(33f) values become larger. The largest piezoelectric coefficient of d(33f) = 408 pm V(–1) was found for a 4-μm film thickness. From a series of films in the thickness range 0.5–5 μm, the z-position dependence of the piezoelectric coefficient could be deduced. A local maximum value of 600 pm V(–1) was deduced in the 3.5–4.5 μm section of the thickest films. The dependence of the film properties on film thickness is attributed to the decreasing effect of the clamping constraint imposed by the substrate and the increasing spatial separation between the grains with increasing film thickness. American Chemical Society 2017-03-01 2017-03-22 /pmc/articles/PMC5364435/ /pubmed/28247756 http://dx.doi.org/10.1021/acsami.6b16470 Text en Copyright © 2017 American Chemical Society This is an open access article published under a Creative Commons Non-Commercial No Derivative Works (CC-BY-NC-ND) Attribution License (http://pubs.acs.org/page/policy/authorchoice_ccbyncnd_termsofuse.html) , which permits copying and redistribution of the article, and creation of adaptations, all for non-commercial purposes. |
spellingShingle | Nguyen, Minh D. Houwman, Evert P. Dekkers, Matthijn Rijnders, Guus Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains |
title | Strongly
Enhanced Piezoelectric Response in Lead Zirconate
Titanate Films with Vertically Aligned Columnar Grains |
title_full | Strongly
Enhanced Piezoelectric Response in Lead Zirconate
Titanate Films with Vertically Aligned Columnar Grains |
title_fullStr | Strongly
Enhanced Piezoelectric Response in Lead Zirconate
Titanate Films with Vertically Aligned Columnar Grains |
title_full_unstemmed | Strongly
Enhanced Piezoelectric Response in Lead Zirconate
Titanate Films with Vertically Aligned Columnar Grains |
title_short | Strongly
Enhanced Piezoelectric Response in Lead Zirconate
Titanate Films with Vertically Aligned Columnar Grains |
title_sort | strongly
enhanced piezoelectric response in lead zirconate
titanate films with vertically aligned columnar grains |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5364435/ https://www.ncbi.nlm.nih.gov/pubmed/28247756 http://dx.doi.org/10.1021/acsami.6b16470 |
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