Ion beam profiling from the interaction with a freestanding 2D layer

Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a freestanding two-dimensional (2D) layer. Experimentally determined sputtering yields of the perforation process can be quantitatively explained using the binary collision theory....

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Detalles Bibliográficos
Autores principales: Shorubalko, Ivan, Choi, Kyoungjun, Stiefel, Michael, Park, Hyung Gyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2017
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5372709/
https://www.ncbi.nlm.nih.gov/pubmed/28462070
http://dx.doi.org/10.3762/bjnano.8.73

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5372709/
https://www.ncbi.nlm.nih.gov/pubmed/28462070
http://dx.doi.org/10.3762/bjnano.8.73

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