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Ion beam profiling from the interaction with a freestanding 2D layer

Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a freestanding two-dimensional (2D) layer. Experimentally determined sputtering yields of the perforation process can be quantitatively explained using the binary collision theory....

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Detalles Bibliográficos
Autores principales:	Shorubalko, Ivan, Choi, Kyoungjun, Stiefel, Michael, Park, Hyung Gyu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2017
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5372709/ https://www.ncbi.nlm.nih.gov/pubmed/28462070 http://dx.doi.org/10.3762/bjnano.8.73

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