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MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison
In the following paper, we present an industry perspective of inertial sensors for navigation purposes driven by applications and customer needs. Microelectromechanical system (MEMS) inertial sensors have revolutionized consumer, automotive, and industrial applications and they have started to fulfi...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375853/ https://www.ncbi.nlm.nih.gov/pubmed/28287483 http://dx.doi.org/10.3390/s17030567 |
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author | Deppe, Olaf Dorner, Georg König, Stefan Martin, Tim Voigt, Sven Zimmermann, Steffen |
author_facet | Deppe, Olaf Dorner, Georg König, Stefan Martin, Tim Voigt, Sven Zimmermann, Steffen |
author_sort | Deppe, Olaf |
collection | PubMed |
description | In the following paper, we present an industry perspective of inertial sensors for navigation purposes driven by applications and customer needs. Microelectromechanical system (MEMS) inertial sensors have revolutionized consumer, automotive, and industrial applications and they have started to fulfill the high end tactical grade performance requirements of hybrid navigation systems on a series production scale. The Fiber Optic Gyroscope (FOG) technology, on the other hand, is further pushed into the near navigation grade performance region and beyond. Each technology has its special pros and cons making it more or less suitable for specific applications. In our overview paper, we present latest improvements at NG LITEF in tactical and navigation grade MEMS accelerometers, MEMS gyroscopes, and Fiber Optic Gyroscopes, based on our long-term experience in the field. We demonstrate how accelerometer performance has improved by switching from wet etching to deep reactive ion etching (DRIE) technology. For MEMS gyroscopes, we show that better than 1°/h series production devices are within reach, and for FOGs we present how limitations in noise performance were overcome by signal processing. The paper also intends a comparison of the different technologies, emphasizing suitability for different navigation applications, thus providing guidance to system engineers. |
format | Online Article Text |
id | pubmed-5375853 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-53758532017-04-10 MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison Deppe, Olaf Dorner, Georg König, Stefan Martin, Tim Voigt, Sven Zimmermann, Steffen Sensors (Basel) Article In the following paper, we present an industry perspective of inertial sensors for navigation purposes driven by applications and customer needs. Microelectromechanical system (MEMS) inertial sensors have revolutionized consumer, automotive, and industrial applications and they have started to fulfill the high end tactical grade performance requirements of hybrid navigation systems on a series production scale. The Fiber Optic Gyroscope (FOG) technology, on the other hand, is further pushed into the near navigation grade performance region and beyond. Each technology has its special pros and cons making it more or less suitable for specific applications. In our overview paper, we present latest improvements at NG LITEF in tactical and navigation grade MEMS accelerometers, MEMS gyroscopes, and Fiber Optic Gyroscopes, based on our long-term experience in the field. We demonstrate how accelerometer performance has improved by switching from wet etching to deep reactive ion etching (DRIE) technology. For MEMS gyroscopes, we show that better than 1°/h series production devices are within reach, and for FOGs we present how limitations in noise performance were overcome by signal processing. The paper also intends a comparison of the different technologies, emphasizing suitability for different navigation applications, thus providing guidance to system engineers. MDPI 2017-03-11 /pmc/articles/PMC5375853/ /pubmed/28287483 http://dx.doi.org/10.3390/s17030567 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Deppe, Olaf Dorner, Georg König, Stefan Martin, Tim Voigt, Sven Zimmermann, Steffen MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title | MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title_full | MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title_fullStr | MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title_full_unstemmed | MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title_short | MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison |
title_sort | mems and fog technologies for tactical and navigation grade inertial sensors—recent improvements and comparison |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5375853/ https://www.ncbi.nlm.nih.gov/pubmed/28287483 http://dx.doi.org/10.3390/s17030567 |
work_keys_str_mv | AT deppeolaf memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison AT dornergeorg memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison AT konigstefan memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison AT martintim memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison AT voigtsven memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison AT zimmermannsteffen memsandfogtechnologiesfortacticalandnavigationgradeinertialsensorsrecentimprovementsandcomparison |