Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of...

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Detalles Bibliográficos
Autores principales: Xu, Lei, Dai, Zhengfei, Duan, Guotao, Guo, Lianfeng, Wang, Yi, Zhou, Hong, Liu, Yanxiang, Cai, Weiping, Wang, Yuelin, Li, Tie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5377049/
https://www.ncbi.nlm.nih.gov/pubmed/26001035
http://dx.doi.org/10.1038/srep10507

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