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Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area Activation
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5384477/ https://www.ncbi.nlm.nih.gov/pubmed/28405058 http://dx.doi.org/10.1021/acs.chemmater.6b04469 |
| _version_ | 1782520468343881728 |
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| author | Mameli, Alfredo Kuang, Yinghuan Aghaee, Morteza Ande, Chaitanya K. Karasulu, Bora Creatore, Mariadriana Mackus, Adriaan J. M. Kessels, Wilhelmus M. M. Roozeboom, Fred |
| author_facet | Mameli, Alfredo Kuang, Yinghuan Aghaee, Morteza Ande, Chaitanya K. Karasulu, Bora Creatore, Mariadriana Mackus, Adriaan J. M. Kessels, Wilhelmus M. M. Roozeboom, Fred |
| author_sort | Mameli, Alfredo |
| collection | PubMed |
| description | |
| format | Online Article Text |
| id | pubmed-5384477 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 2017 |
| publisher | American Chemical Society |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-53844772017-04-10 Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area Activation Mameli, Alfredo Kuang, Yinghuan Aghaee, Morteza Ande, Chaitanya K. Karasulu, Bora Creatore, Mariadriana Mackus, Adriaan J. M. Kessels, Wilhelmus M. M. Roozeboom, Fred Chem Mater American Chemical Society 2017-01-23 2017-02-14 /pmc/articles/PMC5384477/ /pubmed/28405058 http://dx.doi.org/10.1021/acs.chemmater.6b04469 Text en Copyright © 2017 American Chemical Society This is an open access article published under a Creative Commons Non-Commercial No Derivative Works (CC-BY-NC-ND) Attribution License (http://pubs.acs.org/page/policy/authorchoice_ccbyncnd_termsofuse.html) , which permits copying and redistribution of the article, and creation of adaptations, all for non-commercial purposes. |
| spellingShingle | Mameli, Alfredo Kuang, Yinghuan Aghaee, Morteza Ande, Chaitanya K. Karasulu, Bora Creatore, Mariadriana Mackus, Adriaan J. M. Kessels, Wilhelmus M. M. Roozeboom, Fred Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area Activation |
| title | Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area
Activation |
| title_full | Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area
Activation |
| title_fullStr | Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area
Activation |
| title_full_unstemmed | Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area
Activation |
| title_short | Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area
Activation |
| title_sort | area-selective atomic layer deposition of in(2)o(3):h using a μ-plasma printer for local area
activation |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5384477/ https://www.ncbi.nlm.nih.gov/pubmed/28405058 http://dx.doi.org/10.1021/acs.chemmater.6b04469 |
| work_keys_str_mv | AT mamelialfredo areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT kuangyinghuan areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT aghaeemorteza areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT andechaitanyak areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT karasulubora areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT creatoremariadriana areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT mackusadriaanjm areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT kesselswilhelmusmm areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation AT roozeboomfred areaselectiveatomiclayerdepositionofin2o3husingamplasmaprinterforlocalareaactivation |