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Ultra-Small, High-Frequency, and Substrate-Immune Microtube Inductors Transformed from 2D to 3D

Monolithic on-chip inductors are key passive devices in radio frequency integrated circuits (RFICs). Currently, 70–80% of the on-wafer area of most RFIC chips is occupied by the sprawling planar spiral inductors, and its operation frequency is limited to a few GHz. With continuous scaling of the tra...

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Detalles Bibliográficos
Autores principales: Yu, Xin, Huang, Wen, Li, Moyang, Comberiate, Thomas M., Gong, Songbin, Schutt-Aine, Jose E., Li, Xiuling
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5386192/
https://www.ncbi.nlm.nih.gov/pubmed/25913217
http://dx.doi.org/10.1038/srep09661