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Ultra-Small, High-Frequency, and Substrate-Immune Microtube Inductors Transformed from 2D to 3D
Monolithic on-chip inductors are key passive devices in radio frequency integrated circuits (RFICs). Currently, 70–80% of the on-wafer area of most RFIC chips is occupied by the sprawling planar spiral inductors, and its operation frequency is limited to a few GHz. With continuous scaling of the tra...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5386192/ https://www.ncbi.nlm.nih.gov/pubmed/25913217 http://dx.doi.org/10.1038/srep09661 |