Vapor deposition routes to conformal polymer thin films

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic th...

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Detalles Bibliográficos
Autores principales: Moni, Priya, Al-Obeidi, Ahmed, Gleason, Karen K
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2017
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5389201/
https://www.ncbi.nlm.nih.gov/pubmed/28487816
http://dx.doi.org/10.3762/bjnano.8.76
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author Moni, Priya
Al-Obeidi, Ahmed
Gleason, Karen K
author_facet Moni, Priya
Al-Obeidi, Ahmed
Gleason, Karen K
author_sort Moni, Priya
collection PubMed
description Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.
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spelling pubmed-53892012017-05-09 Vapor deposition routes to conformal polymer thin films Moni, Priya Al-Obeidi, Ahmed Gleason, Karen K Beilstein J Nanotechnol Review Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films. Beilstein-Institut 2017-03-28 /pmc/articles/PMC5389201/ /pubmed/28487816 http://dx.doi.org/10.3762/bjnano.8.76 Text en Copyright © 2017, Moni et al. https://creativecommons.org/licenses/by/4.0https://www.beilstein-journals.org/bjnano/termsThis is an Open Access article under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano/terms)
spellingShingle Review
Moni, Priya
Al-Obeidi, Ahmed
Gleason, Karen K
Vapor deposition routes to conformal polymer thin films
title Vapor deposition routes to conformal polymer thin films
title_full Vapor deposition routes to conformal polymer thin films
title_fullStr Vapor deposition routes to conformal polymer thin films
title_full_unstemmed Vapor deposition routes to conformal polymer thin films
title_short Vapor deposition routes to conformal polymer thin films
title_sort vapor deposition routes to conformal polymer thin films
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5389201/
https://www.ncbi.nlm.nih.gov/pubmed/28487816
http://dx.doi.org/10.3762/bjnano.8.76
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AT alobeidiahmed vapordepositionroutestoconformalpolymerthinfilms
AT gleasonkarenk vapordepositionroutestoconformalpolymerthinfilms

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