Fabrication of silicon films from patterned protruded seeds

Thin, flexible silicon crystals are starting up applications such as light-weighted flexible solar cells, SOI, flexible IC chips, 3D ICs imagers and 3D CMOS imagers on the demand of high performance with low cost. Kerfless wafering technology by direct conversion of source gases into mono-crystallin...

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Detalles Bibliográficos
Autores principales: Zeng, Huang, Zhang, Wei, Li, Jizhou, Wang, Cong, Yang, Hui, Chen, Yigang, Chen, Xiaoyuan, Liu, Dongfang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: AIP Publishing LLC 2017
Materias:
Regular Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5429186/
https://www.ncbi.nlm.nih.gov/pubmed/28529821
http://dx.doi.org/10.1063/1.4983575

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5429186/
https://www.ncbi.nlm.nih.gov/pubmed/28529821
http://dx.doi.org/10.1063/1.4983575

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