Cargando…
Nano silica diaphragm in-fiber cavity for gas pressure measurement
We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fa...
Autores principales: | , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5429763/ https://www.ncbi.nlm.nih.gov/pubmed/28400570 http://dx.doi.org/10.1038/s41598-017-00931-0 |
_version_ | 1783236095780061184 |
---|---|
author | Liu, Shen Wang, Yiping Liao, Changrui Wang, Ying He, Jun Fu, Cailing Yang, Kaiming Bai, Zhiyong Zhang, Feng |
author_facet | Liu, Shen Wang, Yiping Liao, Changrui Wang, Ying He, Jun Fu, Cailing Yang, Kaiming Bai, Zhiyong Zhang, Feng |
author_sort | Liu, Shen |
collection | PubMed |
description | We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments. |
format | Online Article Text |
id | pubmed-5429763 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-54297632017-05-15 Nano silica diaphragm in-fiber cavity for gas pressure measurement Liu, Shen Wang, Yiping Liao, Changrui Wang, Ying He, Jun Fu, Cailing Yang, Kaiming Bai, Zhiyong Zhang, Feng Sci Rep Article We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments. Nature Publishing Group UK 2017-04-11 /pmc/articles/PMC5429763/ /pubmed/28400570 http://dx.doi.org/10.1038/s41598-017-00931-0 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Liu, Shen Wang, Yiping Liao, Changrui Wang, Ying He, Jun Fu, Cailing Yang, Kaiming Bai, Zhiyong Zhang, Feng Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title | Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title_full | Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title_fullStr | Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title_full_unstemmed | Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title_short | Nano silica diaphragm in-fiber cavity for gas pressure measurement |
title_sort | nano silica diaphragm in-fiber cavity for gas pressure measurement |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5429763/ https://www.ncbi.nlm.nih.gov/pubmed/28400570 http://dx.doi.org/10.1038/s41598-017-00931-0 |
work_keys_str_mv | AT liushen nanosilicadiaphragminfibercavityforgaspressuremeasurement AT wangyiping nanosilicadiaphragminfibercavityforgaspressuremeasurement AT liaochangrui nanosilicadiaphragminfibercavityforgaspressuremeasurement AT wangying nanosilicadiaphragminfibercavityforgaspressuremeasurement AT hejun nanosilicadiaphragminfibercavityforgaspressuremeasurement AT fucailing nanosilicadiaphragminfibercavityforgaspressuremeasurement AT yangkaiming nanosilicadiaphragminfibercavityforgaspressuremeasurement AT baizhiyong nanosilicadiaphragminfibercavityforgaspressuremeasurement AT zhangfeng nanosilicadiaphragminfibercavityforgaspressuremeasurement |