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Nano silica diaphragm in-fiber cavity for gas pressure measurement

We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fa...

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Detalles Bibliográficos
Autores principales: Liu, Shen, Wang, Yiping, Liao, Changrui, Wang, Ying, He, Jun, Fu, Cailing, Yang, Kaiming, Bai, Zhiyong, Zhang, Feng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5429763/
https://www.ncbi.nlm.nih.gov/pubmed/28400570
http://dx.doi.org/10.1038/s41598-017-00931-0

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