High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits

Development of manufacture trend for TFTs technologies has focused on improving electrical properties of films with the cost reduction to achieve commercialization. To achieve this goal, high-performance sub-50 nm TFTs-based MOSFETs with ON-current (I(on))/subthreshold swing (S.S.) of 181 µA/µm/107 ...

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Detalles Bibliográficos
Autores principales: Wu, Tsung-Ta, Huang, Wen-Hsien, Yang, Chih-Chao, Chen, Hung-Chun, Hsieh, Tung-Ying, Lin, Wei-Sheng, Kao, Ming-Hsuan, Chen, Chiu-Hao, Yao, Jie-Yi, Jian, Yi-Ling, Hsu, Chiung-Chih, Lin, Kun-Lin, Shen, Chang-Hong, Chueh, Yu-Lun, Shieh, Jia-Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431052/
https://www.ncbi.nlm.nih.gov/pubmed/28465531
http://dx.doi.org/10.1038/s41598-017-01012-y

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