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Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering
Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phas...
Autores principales: | Kim, Sung Hyun, Kim, Cheol Hwan, Choi, Woo Jin, Lee, Tae Gon, Cho, Seong Keun, Yang, Yong Suk, Lee, Jae Heung, Lee, Sang-Jin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431166/ https://www.ncbi.nlm.nih.gov/pubmed/28469153 http://dx.doi.org/10.1038/s41598-017-01472-2 |
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