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Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate

In this work, fully transparent high performance double-channel indium-tin-oxide/Al–Sn–Zn–O thin-film transistors (ITO/ATZO TFTs) are successfully fabricated on glass by radio frequency (RF) magnetron sputtering. The ITO layer acts as the bottom channel layer to increase the channel carrier concentr...

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Detalles Bibliográficos
Autores principales:	Cong, Yingying, Han, Dedong, Dong, Junchen, Zhang, Shengdong, Zhang, Xing, Wang, Yi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431434/ https://www.ncbi.nlm.nih.gov/pubmed/28473695 http://dx.doi.org/10.1038/s41598-017-01691-7

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