Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators

In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Tw...

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Autores principales: Ziss, Dorian, Martín-Sánchez, Javier, Lettner, Thomas, Halilovic, Alma, Trevisi, Giovanna, Trotta, Rinaldo, Rastelli, Armando, Stangl, Julian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5433547/
https://www.ncbi.nlm.nih.gov/pubmed/28522879
http://dx.doi.org/10.1063/1.4979859
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author Ziss, Dorian
Martín-Sánchez, Javier
Lettner, Thomas
Halilovic, Alma
Trevisi, Giovanna
Trotta, Rinaldo
Rastelli, Armando
Stangl, Julian
author_facet Ziss, Dorian
Martín-Sánchez, Javier
Lettner, Thomas
Halilovic, Alma
Trevisi, Giovanna
Trotta, Rinaldo
Rastelli, Armando
Stangl, Julian
author_sort Ziss, Dorian
collection PubMed
description In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Two different bonding techniques are studied, namely, gold-thermo-compression and polymer-based SU8 bonding. Our results show a much higher strain-transfer for the “soft” SU8 bonding in comparison to the “hard” bonding via gold-thermo-compression. A comparison between the XRD results and FEM simulations allows us to explain this unexpected result with the presence of complex interface structures between the different layers.
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spelling pubmed-54335472017-05-16 Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators Ziss, Dorian Martín-Sánchez, Javier Lettner, Thomas Halilovic, Alma Trevisi, Giovanna Trotta, Rinaldo Rastelli, Armando Stangl, Julian J Appl Phys Article In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Two different bonding techniques are studied, namely, gold-thermo-compression and polymer-based SU8 bonding. Our results show a much higher strain-transfer for the “soft” SU8 bonding in comparison to the “hard” bonding via gold-thermo-compression. A comparison between the XRD results and FEM simulations allows us to explain this unexpected result with the presence of complex interface structures between the different layers. 2017-04 /pmc/articles/PMC5433547/ /pubmed/28522879 http://dx.doi.org/10.1063/1.4979859 Text en http://creativecommons.org/licenses/by/4.0/ All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Ziss, Dorian
Martín-Sánchez, Javier
Lettner, Thomas
Halilovic, Alma
Trevisi, Giovanna
Trotta, Rinaldo
Rastelli, Armando
Stangl, Julian
Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title_full Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title_fullStr Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title_full_unstemmed Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title_short Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
title_sort comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5433547/
https://www.ncbi.nlm.nih.gov/pubmed/28522879
http://dx.doi.org/10.1063/1.4979859
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