Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators

In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Tw...

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Detalles Bibliográficos
Autores principales: Ziss, Dorian, Martín-Sánchez, Javier, Lettner, Thomas, Halilovic, Alma, Trevisi, Giovanna, Trotta, Rinaldo, Rastelli, Armando, Stangl, Julian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5433547/
https://www.ncbi.nlm.nih.gov/pubmed/28522879
http://dx.doi.org/10.1063/1.4979859

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