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Influence of NH(3) plasma and Ti doping on pH-sensitive CeO(2) electrolyte-insulator-semiconductor biosensors

In this study, CeO(2) pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH(3) plasma treatment on the surface. To examine the effects of Ti doping and plasma trea...

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Detalles Bibliográficos
Autores principales:	Kao, Chyuan-Haur, Chang, Che-Wei, Tzu Chen, Yu, Ming Su, Wei, Cheng Lu, Chien, Lin, Chan-Yu, Chen, Hsiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445090/ https://www.ncbi.nlm.nih.gov/pubmed/28546585 http://dx.doi.org/10.1038/s41598-017-02692-2

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