Fabrication of Large Area Fishnet Optical Metamaterial Structures Operational at Near-IR Wavelengths

In this paper, we demonstrate a fabrication process for large area (2 mm × 2 mm) fishnet metamaterial structures for near IR wavelengths. This process involves: (a) defining a sacrificial Si template structure onto a quartz wafer using deep-UV lithography and a dry etching process (b) deposition of...

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Detalles Bibliográficos
Autores principales: Dutta, Neilanjan, Mirza, Iftekhar O., Shi, Shouyuan, Prather, Dennis W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445803/
https://www.ncbi.nlm.nih.gov/pubmed/28883383
http://dx.doi.org/10.3390/ma3125283

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445803/
https://www.ncbi.nlm.nih.gov/pubmed/28883383
http://dx.doi.org/10.3390/ma3125283

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