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Fabrication of Large Area Fishnet Optical Metamaterial Structures Operational at Near-IR Wavelengths
In this paper, we demonstrate a fabrication process for large area (2 mm × 2 mm) fishnet metamaterial structures for near IR wavelengths. This process involves: (a) defining a sacrificial Si template structure onto a quartz wafer using deep-UV lithography and a dry etching process (b) deposition of...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2010
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445803/ https://www.ncbi.nlm.nih.gov/pubmed/28883383 http://dx.doi.org/10.3390/ma3125283 |