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Hybrid Integrated Platforms for Silicon Photonics

A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic...

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Detalles Bibliográficos
Autores principales: Liang, Di, Roelkens, Gunther, Baets, Roel, Bowers, John E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445873/
http://dx.doi.org/10.3390/ma3031782
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author Liang, Di
Roelkens, Gunther
Baets, Roel
Bowers, John E.
author_facet Liang, Di
Roelkens, Gunther
Baets, Roel
Bowers, John E.
author_sort Liang, Di
collection PubMed
description A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics.
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spelling pubmed-54458732017-07-28 Hybrid Integrated Platforms for Silicon Photonics Liang, Di Roelkens, Gunther Baets, Roel Bowers, John E. Materials (Basel) Review A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics. Molecular Diversity Preservation International 2010-03-12 /pmc/articles/PMC5445873/ http://dx.doi.org/10.3390/ma3031782 Text en © 2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open-access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Review
Liang, Di
Roelkens, Gunther
Baets, Roel
Bowers, John E.
Hybrid Integrated Platforms for Silicon Photonics
title Hybrid Integrated Platforms for Silicon Photonics
title_full Hybrid Integrated Platforms for Silicon Photonics
title_fullStr Hybrid Integrated Platforms for Silicon Photonics
title_full_unstemmed Hybrid Integrated Platforms for Silicon Photonics
title_short Hybrid Integrated Platforms for Silicon Photonics
title_sort hybrid integrated platforms for silicon photonics
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445873/
http://dx.doi.org/10.3390/ma3031782
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