Extrinsic and Intrinsic Frequency Dispersion of High-k Materials in Capacitance-Voltage Measurements

In capacitance-voltage (C-V) measurements, frequency dispersion in high-k dielectrics is often observed. The frequency dependence of the dielectric constant (k-value), that is the intrinsic frequency dispersion, could not be assessed before suppressing the effects of extrinsic frequency dispersion,...

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Detalles Bibliográficos
Autores principales: Tao, J., Zhao, C.Z., Zhao, C., Taechakumput, P., Werner, M., Taylor, S., Chalker, P. R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2012
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5448968/
https://www.ncbi.nlm.nih.gov/pubmed/28817021
http://dx.doi.org/10.3390/ma5061005

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5448968/
https://www.ncbi.nlm.nih.gov/pubmed/28817021
http://dx.doi.org/10.3390/ma5061005

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