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Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry

Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves...

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Detalles Bibliográficos
Autores principales: Benevides, Rodrigo, Santos, Felipe G. S., Luiz, Gustavo O., Wiederhecker, Gustavo S., Alegre, Thiago P. Mayer
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5449385/
https://www.ncbi.nlm.nih.gov/pubmed/28559585
http://dx.doi.org/10.1038/s41598-017-02515-4