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Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry
Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5449385/ https://www.ncbi.nlm.nih.gov/pubmed/28559585 http://dx.doi.org/10.1038/s41598-017-02515-4 |