Pore Narrowing of Mesoporous Silica Materials

To use mesoporous silicas as low-k materials, the pore entrances must be really small to avoid diffusion of metals that can increase the dielectric constant of the low-k dielectric. In this paper we present a new method to narrow the pores of mesoporous materials through grafting of a cyclic-bridged...

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Detalles Bibliográficos
Autores principales: Goethals, Frederik, Levrau, Elisabeth, De Canck, Els, Baklanov, Mikhail R., Detavernier, Christophe, Van Driessche, Isabel, Van Der Voort, Pascal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452099/
https://www.ncbi.nlm.nih.gov/pubmed/28809327
http://dx.doi.org/10.3390/ma6020570

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452099/
https://www.ncbi.nlm.nih.gov/pubmed/28809327
http://dx.doi.org/10.3390/ma6020570

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