Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index simila...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453219/ https://www.ncbi.nlm.nih.gov/pubmed/28788626 http://dx.doi.org/10.3390/ma7053427 |
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author | Alfonso, José E. Olaya, Jhon J. Bedoya-Hincapié, Claudia M. Toudert, Johann Serna, Rosalia |
author_facet | Alfonso, José E. Olaya, Jhon J. Bedoya-Hincapié, Claudia M. Toudert, Johann Serna, Rosalia |
author_sort | Alfonso, José E. |
collection | PubMed |
description | The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index similar to that of single crystals. Films with thickness in the range of 220–250 nm have been successfully grown. After annealing treatment at 600 °C the films show excellent transparency and full crystallization. It is shown that to achieve larger crystallite sizes, up to 17 nm, it is better to carry the annealing under dry air than under oxygen atmosphere, probably because the nucleation rate is reduced. The refractive index of the films is similar under both atmospheres and it is very high (n =2.5 at 589 nm). However it is still slightly lower than that of the single crystal value due to the polycrystalline morphology of the thin films. |
format | Online Article Text |
id | pubmed-5453219 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2014 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-54532192017-07-28 Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films Alfonso, José E. Olaya, Jhon J. Bedoya-Hincapié, Claudia M. Toudert, Johann Serna, Rosalia Materials (Basel) Article The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index similar to that of single crystals. Films with thickness in the range of 220–250 nm have been successfully grown. After annealing treatment at 600 °C the films show excellent transparency and full crystallization. It is shown that to achieve larger crystallite sizes, up to 17 nm, it is better to carry the annealing under dry air than under oxygen atmosphere, probably because the nucleation rate is reduced. The refractive index of the films is similar under both atmospheres and it is very high (n =2.5 at 589 nm). However it is still slightly lower than that of the single crystal value due to the polycrystalline morphology of the thin films. MDPI 2014-04-30 /pmc/articles/PMC5453219/ /pubmed/28788626 http://dx.doi.org/10.3390/ma7053427 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Alfonso, José E. Olaya, Jhon J. Bedoya-Hincapié, Claudia M. Toudert, Johann Serna, Rosalia Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title | Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title_full | Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title_fullStr | Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title_full_unstemmed | Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title_short | Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films |
title_sort | annealing effect on the structural and optical properties of sputter-grown bismuth titanium oxide thin films |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453219/ https://www.ncbi.nlm.nih.gov/pubmed/28788626 http://dx.doi.org/10.3390/ma7053427 |
work_keys_str_mv | AT alfonsojosee annealingeffectonthestructuralandopticalpropertiesofsputtergrownbismuthtitaniumoxidethinfilms AT olayajhonj annealingeffectonthestructuralandopticalpropertiesofsputtergrownbismuthtitaniumoxidethinfilms AT bedoyahincapieclaudiam annealingeffectonthestructuralandopticalpropertiesofsputtergrownbismuthtitaniumoxidethinfilms AT toudertjohann annealingeffectonthestructuralandopticalpropertiesofsputtergrownbismuthtitaniumoxidethinfilms AT sernarosalia annealingeffectonthestructuralandopticalpropertiesofsputtergrownbismuthtitaniumoxidethinfilms |