Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films

The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index simila...

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Autores principales: Alfonso, José E., Olaya, Jhon J., Bedoya-Hincapié, Claudia M., Toudert, Johann, Serna, Rosalia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453219/
https://www.ncbi.nlm.nih.gov/pubmed/28788626
http://dx.doi.org/10.3390/ma7053427
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author Alfonso, José E.
Olaya, Jhon J.
Bedoya-Hincapié, Claudia M.
Toudert, Johann
Serna, Rosalia
author_facet Alfonso, José E.
Olaya, Jhon J.
Bedoya-Hincapié, Claudia M.
Toudert, Johann
Serna, Rosalia
author_sort Alfonso, José E.
collection PubMed
description The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index similar to that of single crystals. Films with thickness in the range of 220–250 nm have been successfully grown. After annealing treatment at 600 °C the films show excellent transparency and full crystallization. It is shown that to achieve larger crystallite sizes, up to 17 nm, it is better to carry the annealing under dry air than under oxygen atmosphere, probably because the nucleation rate is reduced. The refractive index of the films is similar under both atmospheres and it is very high (n =2.5 at 589 nm). However it is still slightly lower than that of the single crystal value due to the polycrystalline morphology of the thin films.
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spelling pubmed-54532192017-07-28 Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films Alfonso, José E. Olaya, Jhon J. Bedoya-Hincapié, Claudia M. Toudert, Johann Serna, Rosalia Materials (Basel) Article The aim of this work is to assess the evolution of the structural and optical properties of Bi(x)Ti(y)O(z) films grown by rf magnetron sputtering upon post-deposition annealing treatments in order to obtain good quality films with large grain size, low defect density and high refractive index similar to that of single crystals. Films with thickness in the range of 220–250 nm have been successfully grown. After annealing treatment at 600 °C the films show excellent transparency and full crystallization. It is shown that to achieve larger crystallite sizes, up to 17 nm, it is better to carry the annealing under dry air than under oxygen atmosphere, probably because the nucleation rate is reduced. The refractive index of the films is similar under both atmospheres and it is very high (n =2.5 at 589 nm). However it is still slightly lower than that of the single crystal value due to the polycrystalline morphology of the thin films. MDPI 2014-04-30 /pmc/articles/PMC5453219/ /pubmed/28788626 http://dx.doi.org/10.3390/ma7053427 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Alfonso, José E.
Olaya, Jhon J.
Bedoya-Hincapié, Claudia M.
Toudert, Johann
Serna, Rosalia
Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title_full Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title_fullStr Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title_full_unstemmed Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title_short Annealing Effect on the Structural and Optical Properties of Sputter-Grown Bismuth Titanium Oxide Thin Films
title_sort annealing effect on the structural and optical properties of sputter-grown bismuth titanium oxide thin films
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453219/
https://www.ncbi.nlm.nih.gov/pubmed/28788626
http://dx.doi.org/10.3390/ma7053427
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