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Influence of Carrier Gas Composition on the Stress of Al(2)O(3) Coatings Prepared by the Aerosol Deposition Method
Al(2)O(3) films were prepared by the aerosol deposition method at room temperature using different carrier gas compositions. The layers were deposited on alumina substrates and the film stress of the layer was calculated by measuring the deformation of the substrate. It was shown that the film stres...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5456195/ https://www.ncbi.nlm.nih.gov/pubmed/28788151 http://dx.doi.org/10.3390/ma7085633 |