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Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices

Thin films of tungsten on piezoelectric substrates La(3)Ga(5)SiO(14) (LGS) and Ca(3)TaGa(3)Si(2)O(14) (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacu...

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Detalles Bibliográficos
Autores principales:	Rane, Gayatri K., Seifert, Marietta, Menzel, Siegfried, Gemming, Thomas, Eckert, Jürgen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5456496/ https://www.ncbi.nlm.nih.gov/pubmed/28787898 http://dx.doi.org/10.3390/ma9020101

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