Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge

Plasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C(2)H(m)/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection a...

Descripción completa

Detalles Bibliográficos
Autores principales: Chandrashekaraiah, Thejaswini Halethimmanahally, Bogdanowicz, Robert, Rühl, Eckart, Danilov, Vladimir, Meichsner, Jürgen, Thierbach, Steffen, Hippler, Rainer
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5456880/
https://www.ncbi.nlm.nih.gov/pubmed/28773715
http://dx.doi.org/10.3390/ma9070594

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5456880/
https://www.ncbi.nlm.nih.gov/pubmed/28773715
http://dx.doi.org/10.3390/ma9070594

Ejemplares similares